TEMIC Desktop SEM & Accesories
TEMIC MARS X6
Model:
The customized large object inspection system in the MIS series is a defect detection and abnormal component analysis instrument developed for high-value and non-destructive large components.
• Large objects are free of fragmentation and no plating of conductive layer, can be customized/automatically analyzed and tested, and can be expanded to measure the three-dimensional shape/roughness measurement
• Recommended industries: key semiconductor components, chip packaging, optoelectronics/power semiconductors
Product specification
• No cutting fragments-customized enlarged cavity stage, allowing non-destructive inspection of 6-inch objects
• Non-plating conductive layer-Advanced Charge Control System (CCS), breaking through the poor conductivity limit of the test object, suitable for ceramics, quartz and plastic polymers and other materials
• Can be connected to the AOI system-equipped with a closed-loop stage, a custom coordinate conversion positioning system, accurate defect component analysis
• Large objects are free of fragmentation and no plating of conductive layer, can be customized/automatically analyzed and tested, and can be expanded to measure the three-dimensional shape/roughness measurement
• Recommended industries: key semiconductor components, chip packaging, optoelectronics/power semiconductors
Product specification
• No cutting fragments-customized enlarged cavity stage, allowing non-destructive inspection of 6-inch objects
• Non-plating conductive layer-Advanced Charge Control System (CCS), breaking through the poor conductivity limit of the test object, suitable for ceramics, quartz and plastic polymers and other materials
• Can be connected to the AOI system-equipped with a closed-loop stage, a custom coordinate conversion positioning system, accurate defect component analysis