HELIOS Commercial Scale Object Coating
The HELIOS industrial line offers cost-effective ALD coatings on parts ranging from microns to meters. HELIOS coating systems bring film quality, atomic-level control and conformal performance of ALD to industrial manufacturing, opening up new possibilities and enabling novel applications as protective of functional surface engineered objects.
Performance
HELIOS is designed for efficiency with ‘zero-waste’ processing, substantially lower factory power consumption and small footprint. A patented integrated abatement ensures minimal maintenance and exceeds uptime records of legacy CVD and PVD equipment.
Commercial Scale Atomic Layer Deposition On Objects
Chemistries:
Cost-effective ALD of films including ZrO2, Al2O3, ZnO, ZnAlO, ZnBO, SiO2, TiO2, TiAlO, TiN, BN, Nb3N5 and more. Seamless and reproducible film engineering with nanolaminate and nanocomposite capabilities, adhesion in excess of 1000 PSI to many different substrates including tin, gold, copper, FR4, polyimides, many different solder mask materials, polyurethanes, ceramics, adhesives and more.
Applications:
• Electronic devices
• Sensors and OLED displays
• PCBs, CoBs, ICs and modules
• Medical devices and sensors
• Optical coatings
• Display and solar technology
• Photo-catalytic coatings
• Encapsulation for environmental, corrosion, and high voltage insulation
Design:
HELIOS accommodates parts with many different shapes and sizes with the combination of modular, parts-specific tooling and a generic loader. Standard chamber size from 1.5-80 liters or up to 1m X 1m panels (custom sizes available).