Semiconductor & Package > Equipment > Programable Signal Monitoring Kit
Programable Signal Monitoring Kit
PSM Wafer Cleaning Process Concentration Monitoring Device

Powerful Kit for process and equipment engineer:

  • Easy upgrade to improve process capability of current process tools.
  • Easy upgrade to improve operation safety of current process tools
  • To reduce chemical consumptions and waste.
Target Applications
  • Wet process monitoring and advance control.
  • CMP process monitoring and advance control.
  • Furnace process monitoring and advance control.
  • Other joint development.

LeadinWay provide a package service of PSM kit that including design/ manufacturing/ installation and after service according to customers specific requirement in process improvement plus safety monitoring in Attractive COO

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