Semiconductor & Package > Parts and accessories > Cyro MicroStar Vacuum Pump
Cyro MicroStar Vacuum Pump
MicroStar &trade A self-contained cryogenic water vapor pump
The Microstar is a state-of-the-art, completely self-contained, compact cryogenic water vapor pump. Unlike conventional systems, it does not require a separate helium compressor and gas lines. This enables fast, simple and painless pump to tool integration, at the lowest possible cost. 
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