BENEFITS
  • Direct RF contact (capacitive parallel plate) is used for uniform plasma generation
  • Equipped with PLC control, Full Automation Plasma Cleaning machine
SYSTEM FEATURES
  • Durable Aluminum Vacuum Chamber
  • Approximate Inside Dimensions 12" Diameter x 11" Deep
  • Single 9"W x 10"D horizontal Direct Contact RF powered electrode
  • 5.5" (minimum) chamber height clearance
  • 400 Watt, 50 KHz Continuously variable RF power supply
  • 2 Rotometers, 2 Gas Controls, 0-25cc/min w/Precision Needle Valves
  • Thermocouple Vacuum Gauge, 0-1 Torr
  • PLC Microprocessor Control System
  • Console Dimensions: 18" W X 19" X 24"H
  • 5 CFM 2-Stage Direct Drive Oil Vacuum Pump
APPLICATIONS
  • Plasma sterilization
  • Surface modification