PE Plasma Clean Etch Equipment
PE MKII Plasma Etch Model
Model:
Processing your boards, whether they be small or large, PTFE, Polyamide or Rigid-Flex you will find that all are uniformly etched by the MK-II, ready for your next production step.
As plasma is inherently a green process it also reduces production expense by eliminating unwelcome and often expensive chemical waste associated with chemical etching and cleaning
As plasma is inherently a green process it also reduces production expense by eliminating unwelcome and often expensive chemical waste associated with chemical etching and cleaning
BENEFITS
SYSTEM FEATURES
APPLICATIONS
- The generous aluminum chamber accommodates a properly sized active processing surface with our standard configurations having as few as 6 or as many as 24 plasma processing levels, each 24&rdquo by 18.
- Oxygen service vacuum pump and booster is equipped with a two point purge system to minimize any corrosive end products forming in the pump thereby extending the service life while lowering maintenance costs.
- Modify or custom build a system to meet your specific needs including RIE (Reactive Ion Etching).
SYSTEM FEATURES
- 6, 8, 12, 16 and 24 Horizontal &ldquoShelf&rdquo Systems available
- Each shelf is 24&rdquo x 18&rdquo on 1.5&rdquo Spacing
- R.F. Generator & Automatic Matching Network 1250 to 5000 Watts @ 13.56MHz
- Electrostatic Shielding of chamber to promote uniformity
- Process Temperature Control 1250 F to 3000 F to eliminate a warm up cycle
- Two Mass Flow Controllers, 0-2000 SCCM
- Low gas supply pressure alarms on process and purge gas
- MKS 0-10 Torr Capacitance Vacuum Gauge
- Microprocessor Control System w/ Touch Screen interface
- Multiple (up to 3 stage) Recipe Storage
- Edwards Oxygen Service Vacuum Pump | Edwards Roots style Booster Blower
- 3 Micron Vacuum Pump Oil Filtration
- Two point Automatic N2 Purging of the Vacuum Pump
- Oil Mist Coalescing Filter on the Vacuum pump&rsquos exhaust
- Windows Computer Control System w/ Touch Screen Interface
- Data Recording, Reporting w/Event Viewing and printing
- Signal Light Tower | Edwards GV80 Dry Vacuum Pump
- MKS Automatic Throttle Vacuum Controller | Up to 4 Mass Flow Controllers
- Process controlled Gas steering matrix 5 gas inputs through 2 or 3 MFC&rsquos
- Controlled Rate N2 Chamber Purging | Custom Chamber sizes and configurations
- Custom Electrode sizes and configurations
APPLICATIONS
- PCB Via Etch/Desmear/EtchBack/Descum