The ProSys Direct Megasonic Systems can be configured for 150-450mm processing. The advanced controls ensure that no misprocessing of substrates takes place. This complete, quartz direct-Megasonic cleaning system is ready to install in your process stations as a replacement for your legacy systems.
Direct Megasonic energy is more uniform than indirect, achieving an equivalent pressure for 60% less input. The controls self-monitor and ensure that no material is misprocessed.