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Programmable Signal Monitoring Kit

Leadinway Programmable Signal Monitoring System

Model:
Powerful Kit for process and equipment engineer:
Easy upgrade to improve process capability of current process tools.
Easy upgrade to improve operation safety of current process tools
To reduce chemical consumptions and waste.
Target Applications
Wet process monitoring and advance control.
CMP process monitoring and advance control.
Furnace process monitoring and advance control.
Other joint development.
LeadinWay provide a package service of PSM kit that including design/ manufacturing/ installation and after service according to customers specific requirement in process improvement plus safety monitoring in Attractive COO
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PSM Wafer Cleaning Process Concentration Monitoring Device

PSM Advantage :
Problems 　 LW solution Benefit to customer
Concentration is Out of range without any alarm PSM can assist the concentration monitoring with alarm setting Keep high yield rate without yield lose.
Spiking is not optimized. Waste the chemicals PSM controls spiking by pre set chemical range. Manage the process concentration stability. Saving chemical consumption Example: SPM life time can be extended to 3-4days from 1-2 days. Saving money.
Wafer will die in the tank without proper EMG handling procedure PSM provides customized EMG handling procedure to reach the goal of keeping wafer safety when a trouble occurred. Saving wafers from accident occurred. Saving the money.
Wafer is not dry even after drying process. Wafer may die without any alarm. PSM provides the drying process monitoring function. Saving wafers or rework cost. Saving money.
Waste time to find out root causes of troubles when parts are broken. PSM can assist to build up the alarm when parts are broken. Saving wafers and maintenance cost. Saving money.