Atomic Layer Deposition-system
Levitech Levitrack ALD
Model:
The Levitrack Atomic Layer Deposition-system (ALD) is designed to deposit layers of atomic thicknesses at mass-production volume. This process provides passivation layers which increases the efficiency of solar cells. In Levitrack systems, wafer-substrates are introduced into a process-chamber while floating on a very thin gas layer, enabling conductive heating. After achieving process temperature, the substrates levitate without contact or force through a series of ALD deposition cells. The wafer is then rapidly cooled using conductive cooling.
Recent developments on the Levitrack system enabled multi-layer ALD in continuous mass-production of tandem solar cells.
Recent developments on the Levitrack system enabled multi-layer ALD in continuous mass-production of tandem solar cells.
For more information, please contact us:
Phone:+886-3-656-0883
Fax:+886-3-656-4486
E-mail:sales@leadinway.com.tw
Fax:+886-3-656-4486
E-mail:sales@leadinway.com.tw