Lens pixels：12 Million Pixels
Resolution：5.5um
Inspection speed (5um)：15cm²/sec
Dimensions: W: 870(mm) / H: 1484(mm) / D: 1150(mm)
Effective range of detection：400mm x 400mm
Multi-combined detection light source：RGB Light/ Coaxial Light
Multitasking：One vs four workstations
Graphical operation interface / Statistical process analyzing system.
Centralized remote reviewing/programming system.