Werner Lieb GmbH
SMIF LOAD PORT LP200-SMIF R EUV
Model:LP200-SMIF R EUV
FEATURES
- For reticle pods SEMI E100 and E152 EUV
- ISO Class 1
- SEMI S2, S8, E100, E152, E117 and E19.4-0417 compliant
- Made in Germany
OPTIONS
- OHT package including SEMI E84
- RFID reading
- For reticle pods SEMI E100 and E152 EUV
- ISO Class 1
- SEMI S2, S8, E100, E152, E117 and E19.4-0417 compliant
- Made in Germany
OPTIONS
- OHT package including SEMI E84
- RFID reading
TECHNICAL DATA SHEET
DIMENSIONS
